US 12,282,315 B2
Scheduling substrate routing and processing
Chongyang Wang, Saratoga, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 11, 2022, as Appl. No. 17/862,056.
Application 17/862,056 is a continuation of application No. 16/911,125, filed on Jun. 24, 2020, granted, now 11,385,628.
Prior Publication US 2022/0365516 A1, Nov. 17, 2022
Int. Cl. G05B 19/418 (2006.01); H01L 21/67 (2006.01)
CPC G05B 19/4187 (2013.01) [G05B 19/4183 (2013.01); H01L 21/67276 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
determining a plurality of queue times associated with a plurality of operations of a sequence recipe, the plurality of operations being associated with production of a plurality of substrates in a substrate processing system, the plurality of operations comprising one or more revisit operations of a respective substrate revisiting a corresponding processing chamber;
identifying a plurality of time durations corresponding to the plurality of operations;
calculating, based on a maximum time duration of the plurality of time durations, a takt time for the plurality of substrates, wherein the takt time is a calculated pace corresponding to an amount of time between a previous substrate and a subsequent substrate entering the substrate processing system, the takt time being associated with the plurality of operations comprising the one or more revisit operations;
generating a schedule based on the takt time and the plurality of queue times; and
transmitting the schedule to a controller of the substrate processing system, wherein the controller is to control the substrate processing system to produce the plurality of substrates based on the schedule.