	US 12,282,259 B2
	Liquid chemical, method for producing liquid chemical, and method for analyzing test target solution
Tetsuya Kamimura, Haibara-gun (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Jul. 9, 2020, as Appl. No. 16/924,859.
Application 16/924,859 is a continuation of application No. PCT/JP2019/000441, filed on Jan. 10, 2019.
Claims priority of application No. 2018-003583 (JP), filed on Jan. 12, 2018.
Prior Publication US 2020/0341382 A1, Oct. 29, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. G03F 7/32 (2006.01); G01N 15/06 (2006.01); G01N 21/95 (2006.01); G03F 7/004 (2006.01); G03F 7/11 (2006.01); G01N 15/075 (2024.01); G03F 7/20 (2006.01)

CPC G03F 7/325 (2013.01) [G01N 15/06 (2013.01); G01N 21/9505 (2013.01); G03F 7/0048 (2013.01); G03F 7/11 (2013.01); G01N 15/075 (2024.01); G03F 7/2006 (2013.01)]

18 Claims

1. A liquid chemical comprising:

an organic solvent;

metal-containing particles containing a metal atom and having a particle size of 10 to 100 nm, and

an organic compound having a boiling point of 300° C. or higher,

wherein the number of the metal-containing particles contained is 1.0×10⁸to 1.0×10¹¹particles/cm³, and

the organic solvent is at least one selected from the group consisting of propylene glycol monomethyl ether, propylene glycol monoethyl ether (PGME), propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate (PGMEA), ethyl lactate (EL), methyl methoxypropionate, cyclopentanone, cyclohexanone (CHN), γ-butyrolactone, diisoamyl ether, butyl acetate (nBA), isoamyl acetate, dimethyl sulfoxide, N-methyl-2-pyrrolidone, ethylene carbonate, propylene carbonate (PC), sulfolane, cycloheptanone, decane, and 2-heptanone.