| CPC G03F 7/2008 (2013.01) [G01B 11/27 (2013.01); G02B 7/1822 (2013.01); G03F 7/2004 (2013.01); H01S 3/086 (2013.01)] | 15 Claims |
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1. A positioning device for positioning a scraper mirror, provided for coupling out laser radiation, in a positioning plane being defined by a first positioning axis and a second positioning axis, wherein the first positioning axis and the second positioning axis running perpendicular to each other, the positioning device comprising:
two positioning units including a first positioning unit assigned to the first positioning axis and a second positioning unit assigned to said second positioning axis,
said first positioning unit having a first linear guide and a first positioning drive, wherein said first linear guide having a mirror-side guide element and a mirror-remote guide element, wherein said mirror-side guide element of said first linear guide being connected to the scraper mirror and jointly guided with the scraper mirror on said mirror-remote guide element of said first linear guide along the first positioning axis, and wherein by means of said first positioning drive, the scraper mirror can be moved together with said mirror-side guide element of said first linear guide relative to said mirror-remote guide element of said first linear guide along the first positioning axis into a target position;
said second positioning unit containing a second linear guide and a second positioning drive, wherein said second linear guide having a mirror-side guide element and a mirror-remote guide element, wherein said mirror-side guide element of said second linear guide being connected to said mirror-remote guide element of said first linear guide, and is movably guided along the second positioning axis jointly with said first linear guide and the scraper mirror on said mirror-remote guide element of said second linear guide, and wherein by means of said second positioning drive, said first linear guide can be moved together with said mirror-side guide element of said second linear guide and the scraper mirror relative to said mirror-remote guide element of said second linear guide along the second positioning axis into a target position; and
a guide frame having four frame arms running perpendicular to each other, wherein:
two of said frame arms of said guide frame are frame arms of said first linear guide, and two further ones of said frame arms of said guide frame are frame arms of said second linear guide;
said frame arms of said first linear guide run along the first positioning axis, are spaced apart from each other along the second positioning axis, and each form a mirror-remote guide element of said first linear guide;
said frame arms of said second linear guide run along the second positioning axis, are spaced apart from each other along the first positioning, axis and each form a mirror-side guide element of said second linear guide;
on each of said frame arms of said first linear guide, said mirror-side guide element of said first linear guide assigned to a frame arm and connected to the scraper mirror is movably guided jointly with the scraper mirror along the first positioning axis;
each of said frame arms of said second linear guide is movably guided along the second positioning axis jointly with said first linear guide and the scraper mirror on an associated mirror-remote guide element of said second linear guide;
by means of said first positioning drive, the scraper mirror can be moved together with said mirror-side guide elements of said first linear guide relative to said frame arms of said first linear guide along the first positioning axis into the target position; and
by means of said second positioning drive, said guide frame can be moved together with said mirror-side guide elements of said first linear guide and the scraper mirror along the second positioning axis into a target position.
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