US 12,282,214 B2
Thin film lithium niobate optical device having an engineered substrate for heterogeneous integration
Christian Reimer, Wellesley, MA (US); and Mian Zhang, Cambridge, MA (US)
Assigned to HyperLight Corporation, Cambridge, MA (US)
Filed by HyperLight Corporation, Cambridge, MA (US)
Filed on Jun. 16, 2023, as Appl. No. 18/211,170.
Application 18/211,170 is a continuation in part of application No. 17/843,906, filed on Jun. 17, 2022.
Application 17/843,906 is a continuation of application No. 17/102,047, filed on Nov. 23, 2020, granted, now 11,567,353, issued on Jan. 31, 2023.
Claims priority of provisional application 63/353,501, filed on Jun. 17, 2022.
Claims priority of provisional application 63/112,867, filed on Nov. 12, 2020.
Claims priority of provisional application 63/033,666, filed on Jun. 2, 2020.
Claims priority of provisional application 62/941,139, filed on Nov. 27, 2019.
Prior Publication US 2023/0384627 A1, Nov. 30, 2023
Int. Cl. G02F 1/03 (2006.01); G02F 1/035 (2006.01)
CPC G02F 1/0356 (2013.01) [G02F 2201/063 (2013.01); G02F 2201/122 (2013.01); G02F 2202/20 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An electro-optic device, comprising:
a substrate including a trench region having a plurality of trenches therein, the trench region having an effective microwave index based on a substrate material and the plurality of trenches, wherein the plurality of trenches include a first row of trenches and a second row of trenches, and wherein the first row of trenches and the second row of trenches are non-intersecting;
an insulator on the substrate;
an optical structure on the insulator, the optical structure having a thin film electro-optic layer including lithium; and
an electrode proximate to a portion of the optical structure, wherein the electrode forms a grating in plan view, wherein the grating includes a plurality of chambers, wherein at least one chamber of the plurality of chambers is not completely enclosed in plan view, and wherein the at least one chamber surrounds at least one trench in plan view, and wherein the electro-optic device includes one or more of the following:
a fill that partially fills at least one trench of the plurality of trenches;
the first trench having a different length than the second trench;
the plurality of trenches not extending through the insulator;
an additional insulator being provided on the insulator; and/or
the plurality of trenches being disposed between the electrode and the optical structure and also extending under the optical structure, wherein an opening of a trench of the plurality of trenches has an oval shaped footprint.