US 12,282,153 B2
MEMS mirror in series with resonant MEMS mirror to redistribute dense pixels
Daniel Adema, Kitchener (CA)
Assigned to GOOGLE LLC, Mountain View, CA (US)
Filed by GOOGLE LLC, Mountain View, CA (US)
Filed on Jan. 18, 2022, as Appl. No. 17/578,027.
Prior Publication US 2023/0228985 A1, Jul. 20, 2023
Int. Cl. G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 27/01 (2006.01)
CPC G02B 26/0833 (2013.01) [G02B 26/101 (2013.01); G02B 27/0172 (2013.01); G02B 27/0176 (2013.01); G02B 2027/0154 (2013.01); G02B 2027/0178 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A near-eye display system comprising:
a waveguide having an incoupler (IC);
a first micro-electromechanical system (MEMS) mirror to receive collimated light and rotate about a first axis at a first amplitude and at a first frequency to generate scanned light having a first range of scan angles; and
a second MEMS mirror in series with the first MEMS mirror to rotate about a second axis in a sinusoidal pattern at a second amplitude and at a second frequency to direct the scanned light to the IC to represent pixels of an image, wherein the second frequency differs by at least 0.5% from the first frequency and wherein the first MEMS mirror redistributes the pixels of the image.