US 12,282,077 B2
Sensor
Hiromichi Umehara, Tokyo (JP); Keisuke Takasugi, Tokyo (JP); Takehiro Isoda, Tokyo (JP); and Kenji Inage, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Jun. 7, 2024, as Appl. No. 18/737,185.
Application 18/737,185 is a continuation of application No. 17/945,485, filed on Sep. 15, 2022, granted, now 12,044,753.
Claims priority of provisional application 63/246,437, filed on Sep. 21, 2021.
Claims priority of application No. 2022-139158 (JP), filed on Sep. 1, 2022.
Prior Publication US 2024/0319292 A1, Sep. 26, 2024
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01); G01R 33/02 (2006.01)
CPC G01R 33/093 (2013.01) [G01R 33/0005 (2013.01); G01R 33/0206 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A sensor configured to detect a physical quantity, comprising:
a substrate including a top surface;
a support member disposed on the substrate; and
a sensor element configured to change in a physical property depending on the physical quantity, wherein
the support member includes a flat portion including a flat surface parallel to the top surface of the substrate, and a protruding portion shaped to protrude from the flat surface,
the protruding portion includes an inclined surface inclined with respect to the top surface of the substrate,
the sensor element includes a functional layer constituting at least a part of the sensor element,
the functional layer is disposed on the inclined surface,
the protruding portion extends in a first direction parallel to the top surface of the substrate, and includes a first end portion located at an end of the protruding portion in the first direction,
the protruding portion includes a first portion, and a second portion located at a position forward of the first portion in the first direction and including the first end portion, and
a dimension of the second portion in a second direction perpendicular to the top surface of the substrate becomes smaller in a direction away from the first portion.