US 12,282,076 B2
Sensor
Hiromichi Umehara, Tokyo (JP); Keita Kawamori, Tokyo (JP); Kenzo Makino, Tokyo (JP); and Masachika Hashino, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Apr. 29, 2024, as Appl. No. 18/649,207.
Application 18/649,207 is a continuation of application No. 17/945,514, filed on Sep. 15, 2022, granted, now 12,000,910.
Claims priority of provisional application 63/246,437, filed on Sep. 21, 2021.
Prior Publication US 2024/0280651 A1, Aug. 22, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01)
CPC G01R 33/093 (2013.01) [G01R 33/0047 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A sensor configured to detect a predetermined physical quantity, comprising:
a substrate including a top surface;
a support member disposed on the substrate; and
a sensor element configured to change in a physical property depending on the predetermined physical quantity, wherein
the sensor element is supported by the support member,
the support member includes a protruding surface protruding in a direction away from the top surface of the substrate and including at least one inclined surface,
the protruding surface includes an upper end portion farthest from the top surface of the substrate,
the protruding surface includes a first curved surface portion including the upper end portion of the protruding surface, and a second curved surface portion continuous with the first curved surface portion and located between the first curved surface portion and the top surface of the substrate in a direction perpendicular to the top surface of the substrate,
the first curved surface portion is a curved surface protruding in the direction away from the top surface of the substrate,
the second curved surface portion is a curved surface protruding in a direction closer to the top surface of the substrate, and
a radius of curvature of the second curved surface portion in a cross section perpendicular to the top surface of the substrate is smaller than a radius of curvature of the first curved surface portion in the cross section perpendicular to the top surface of the substrate, and is greater than or equal to 0.3 μm.