US 12,282,040 B2
Micro-optomechanical system and method for the production thereof
Philipp-Immanuel Dietrich, Igersheim (DE); Gerald Goering, Karlsbad (DE); Matthias Blaicher, Ettlingen (DE); Mareike Trappen, Karlsruhe (DE); Hendrik Hölscher, Weingarten (DE); and Christian Koos, Siegelsbach (DE)
Assigned to Karlsruher Institut für Technologie, Karlsruhe (DE)
Appl. No. 15/733,175
Filed by Karlsruher Institut für Technologie, Karlsruhe (DE)
PCT Filed Dec. 4, 2018, PCT No. PCT/EP2018/083414
§ 371(c)(1), (2) Date Jun. 4, 2020,
PCT Pub. No. WO2019/110548, PCT Pub. Date Jun. 12, 2019.
Claims priority of application No. 10 2017 221 952.1 (DE), filed on Dec. 5, 2017.
Prior Publication US 2021/0096152 A1, Apr. 1, 2021
Int. Cl. G01Q 20/02 (2010.01); G01H 9/00 (2006.01); G01Q 10/04 (2010.01); G01Q 60/06 (2010.01); G01Q 60/24 (2010.01); G02B 26/08 (2006.01); G01B 9/02017 (2022.01)
CPC G01Q 10/045 (2013.01) [G01H 9/006 (2013.01); G01Q 20/02 (2013.01); G01Q 60/06 (2013.01); G02B 26/0841 (2013.01); G01B 9/02021 (2013.01)] 32 Claims
OG exemplary drawing
 
1. A micro-optomechanical system, comprising
at least one optical subsystem configured for emitting at least one optical actuator signal and for receiving at least one optical sensor signal;
at least one optomechanical structure which is produced from a photoresist in direct contact with the optical subsystem by means of a direct writing microstructuring method, wherein the direct writing microstructuring method is an additive method, wherein the optomechanical structure comprises at least one optical actuation element and at least one optical sensor element,
wherein the optical actuator signal in interaction with the optical actuation element is configured for changing a mechanical state of the optomechanical structure, wherein the optical sensor signal in interaction with the optical sensor element is configured for detecting the change in the mechanical state of the optomechanical structure or a variable related thereto, and wherein the optical actuation element and the optical sensor element are integrated in the optomechanical structure to form an inseparable unit;
wherein the optical subsystem has a facet;
wherein the optical sensor element has a freeform mirror, wherein the optical sensor element is designed as an optical resonator, wherein the optical resonator is formed between the facet and the freeform mirror, wherein the freeform mirror is positioned at a free end of the optomechanical structure; and
wherein the optical actuation element includes a heating location on the optomechanical structure where the optical actuator signal impinges to heat the optical actuation element to cause movement, wherein the heating location is positioned proximal to a fixed end of the optomechanical structure that is opposite to the free end.