US 12,281,723 B2
Gas pressure balance valve, gas pressure balance method, and load locking chamber
Wenzhe Li, Hefei (CN); and Wenbo Zhang, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Jun. 23, 2022, as Appl. No. 17/808,495.
Application 17/808,495 is a continuation of application No. PCT/CN2022/087386, filed on Apr. 18, 2022.
Claims priority of application No. 202210126263.1 (CN), filed on Feb. 10, 2022.
Prior Publication US 2023/0250894 A1, Aug. 10, 2023
Int. Cl. F16K 47/08 (2006.01); F16K 17/168 (2006.01); F16K 51/02 (2006.01); G05D 16/00 (2006.01); H01L 21/67 (2006.01)
CPC F16K 47/08 (2013.01) [F16K 17/168 (2013.01); F16K 51/02 (2013.01); G05D 16/028 (2019.01); H01L 21/67201 (2013.01); Y10T 137/88054 (2015.04)] 16 Claims
OG exemplary drawing
 
1. A gas pressure balance valve, comprising: a valve body comprising a gas inlet end and a gas outlet end, wherein the gas inlet end is configured to be connected with a first gas pressure area, the gas outlet end is configured to be connected with a second gas pressure area, and a pressure difference is existed between the first gas pressure area and the second gas pressure area; a one-way valve, located in the valve body, and configured to perform a pressure adjustment to achieve the balance between pressures of the first gas pressure area and the second gas pressure area; and a buffer assembly, located between the gas inlet end and the one-way valve, and configured to adjust a pressure on a surface of the one-way valve; wherein the valve body comprises a first pipe and a second pipe, one end of the first pipe forms the gas inlet end, one end of the second pipe forms the gas outlet end, and the other end of the first pipe and the other end of the second pipe face towards each other and form a pipe orifice; and wherein the one-way valve is located in the second pipe, the buffer assembly is located at the pipe orifice and acts along with a change in the pressure of the first gas pressure area to adjust a degree of opening of the pipe orifice and then dynamically adjust the pressure on the surface of the one-way valve; wherein an area between the one-way valve and the pipe orifice forms a buffer space, the buffer assembly comprises a drive member and a blocking sheet, and the blocking sheet is connected to the drive member and movable with respect to the pipe orifice under the drive of the drive member to adjust the degree of opening of the pipe orifice; wherein the drive member comprises at least one of a hydraulic drive member, a pneumatic drive member, or a motor drive member; wherein the hydraulic drive member comprises: a compressed gas source; a first valve, connected to the compressed gas source; a first pressure introducing pipe, wherein one end of the first pressure introducing pipe is connected to the first valve, the other end of the first pressure introducing pipe abuts against one end of the blocking sheet, and a hydraulic fluid is provided in the first pressure introducing pipe; and a second pressure introducing pipe, wherein one end of the second pressure introducing pipe is connected to the first valve, the other end of the second pressure introducing pipe abuts against the other end of the blocking sheet, and a hydraulic fluid is provided in the second pressure introducing pipe, wherein the compressed gas source is configured to supply a compressed gas into the first pressure introducing pipe or the second pressure introducing pipe through the first valve, to drive the hydraulic fluid to drive the blocking sheet to move.