US 12,281,402 B2
Low angle membrane frame for an electroplating cell
Frederick Dean Wilmot, Gladstone, OR (US); Robert Rash, West Linn, OR (US); Nirmal Shankar Sigamani, Sherwood, OR (US); and Gabriel Graham, Portland, OR (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/639,514
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Sep. 2, 2020, PCT No. PCT/US2020/048972
§ 371(c)(1), (2) Date Mar. 1, 2022,
PCT Pub. No. WO2021/046068, PCT Pub. Date Mar. 11, 2021.
Claims priority of provisional application 62/895,245, filed on Sep. 3, 2019.
Prior Publication US 2022/0298667 A1, Sep. 22, 2022
Int. Cl. C25D 17/00 (2006.01); C25D 17/08 (2006.01); C25D 17/10 (2006.01)
CPC C25D 17/002 (2013.01) [C25D 17/001 (2013.01); C25D 17/008 (2013.01); C25D 17/08 (2013.01); C25D 17/10 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A cell to process a substrate, the cell comprising:
at least one chamber wall arranged to form a cavity below a holder of the substrate;
a membrane frame disposed on the at least one chamber wall and across the cavity; and
a membrane supported by the membrane frame and separating a first electrolyte from a second electrolyte, wherein the membrane comprises a surface extending from a center of the cavity radially outward and upward at an angle relative to a reference plane, wherein the angle is above the reference plane and measured from the reference plane to the surface of the membrane, and wherein the angle is greater than or equal to 0° and less than or equal to 3°.