US 12,281,383 B2
Indium precursor compound, method of preparing thin film using the same, and board prepared using the same
Chang Bong Yeon, Gyeonggi-do (KR); Jin Hee Kim, Gyeonggi-do (KR); Jae Sun Jung, Gyeonggi-do (KR); and Seok Jong Lee, Gyeonggi-do (KR)
Assigned to SOULBRAIN CO., LTD., Gyeonggi-do (KR)
Appl. No. 17/773,287
Filed by SOULBRAIN CO., LTD., Gyeonggi-do (KR)
PCT Filed Oct. 28, 2020, PCT No. PCT/KR2020/014801
§ 371(c)(1), (2) Date Apr. 29, 2022,
PCT Pub. No. WO2021/086006, PCT Pub. Date May 6, 2021.
Claims priority of application No. 10-2019-0136318 (KR), filed on Oct. 30, 2019; and application No. 10-2020-0140859 (KR), filed on Oct. 28, 2020.
Prior Publication US 2024/0167151 A1, May 23, 2024
Int. Cl. C23C 16/18 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/18 (2013.01) [C23C 16/407 (2013.01); C23C 16/45525 (2013.01)] 11 Claims
 
1. An indium precursor compound, represented by Chemical Formula 1 below:

OG Complex Work Unit Chemistry
wherein R1, R3, and R4 are each independently a substituted or unsubstituted alkyl group having 1 to 6 carbon atoms, R2 is a linear or branched alkyl group having 1 to 6 carbon atoms, R5 and R6 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms, X is carbon or a heteroatom, and n is an integer from 1 to 3.