US 12,281,380 B2
CRN coating film and sliding member
Syun Sugawara, Tokyo (JP); and Takatsugu Iwashita, Tokyo (JP)
Assigned to TPR Co., Ltd., Tokyo (JP)
Appl. No. 18/035,779
Filed by TPR Co., Ltd., Tokyo (JP)
PCT Filed Aug. 6, 2021, PCT No. PCT/JP2021/029273
§ 371(c)(1), (2) Date May 8, 2023,
PCT Pub. No. WO2022/137631, PCT Pub. Date Jun. 30, 2022.
Claims priority of application No. 2020-213722 (JP), filed on Dec. 23, 2020.
Prior Publication US 2023/0416903 A1, Dec. 28, 2023
Int. Cl. C23C 14/06 (2006.01); C23C 14/32 (2006.01); F16J 9/26 (2006.01)
CPC C23C 14/0641 (2013.01) [C23C 14/32 (2013.01); F16J 9/26 (2013.01)] 6 Claims
 
1. A CrN coating film, having a preferred orientation of 200 as determined by XRD,
wherein
an X-ray diffraction intensity ratio of a (200) plane with respect to a (111) plane, (200)/(111), is 5.5 or higher, and
a ratio of crystal grains of 1 μm or smaller is 85% or higher in a crystal grain size distribution measured by an EBSD analysis.