US 12,280,566 B2
Ceramic susceptor
Taekgon Kim, Anseong-si (KR)
Assigned to MiCo Ceramics Ltd., Anseong-si (KR)
Filed by MiCo Ceramics Ltd., Anseong-si (KR)
Filed on Oct. 31, 2023, as Appl. No. 18/498,084.
Claims priority of application No. 10-2022-0142639 (KR), filed on Oct. 31, 2022.
Prior Publication US 2024/0140076 A1, May 2, 2024
Int. Cl. B32B 18/00 (2006.01); C23C 16/06 (2006.01); C23C 16/458 (2006.01)
CPC B32B 18/00 (2013.01) [C23C 16/06 (2013.01); C23C 16/4586 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A ceramic susceptor comprising a ceramic plate with a radio-frequency electrode disposed therein,
wherein the ceramic plate comprises a connector connected to the radio-frequency electrode,
the ceramic susceptor comprises a rod having one end connected to the connector to supply power to the radio-frequency electrode, and
the rod employs Mo, W, or an alloy thereof as a base material,
wherein an opening is disposed in the ceramic plate, and one end of the rod is brazed and joined to the connector by a conductive filler inside the opening, wherein an ALCrN film is coated on a vertical outer surface of the rod, and
wherein the base material of the rod reduces a power loss in response to a skin effect that occurs when a high-frequency signal is applied to the rod, and the AlCrN film prevents oxidation of the rod and suppresses an impedance increase caused by a use of the rod.