US 12,280,443 B2
Laser machining device
Hirotake Fukuoka, Hamamatsu (JP); and Yuta Kondoh, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/256,836
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jul. 1, 2019, PCT No. PCT/JP2019/026186
§ 371(c)(1), (2) Date Dec. 29, 2020,
PCT Pub. No. WO2020/009079, PCT Pub. Date Jan. 9, 2020.
Claims priority of application No. 2018-128474 (JP), filed on Jul. 5, 2018.
Prior Publication US 2021/0370437 A1, Dec. 2, 2021
Int. Cl. B23K 26/03 (2006.01); B23K 26/046 (2014.01); B23K 26/06 (2014.01); B23K 26/53 (2014.01)
CPC B23K 26/032 (2013.01) [B23K 26/046 (2013.01); B23K 26/0643 (2013.01); B23K 26/53 (2015.10)] 5 Claims
OG exemplary drawing
 
1. A laser processing device configured to apply laser light to an object to be processed along a line to process, to perform laser processing on the object to be processed along the line to process, the laser processing device comprising:
a laser light source configured to output the laser light;
a measurement light source configured to output measurement light;
a converging unit configured to converge the laser light toward the object to be processed to form a first converging point and converges the measurement light toward the object to be processed to form a second converging point;
a measurement part configured to measure displacement of an entrance surface according to reflected light of the measurement light on the entrance surface of the laser light and the measurement light in the object to be processed;
an adjustment unit configured to adjust a position of the first converging point in a direction intersecting the entrance surface according to a measurement result of the displacement of the entrance surface;
a spatial light modulator configured to modulate the laser light according to a modulation pattern between the laser light source and the converging unit; and
a controller configured to control the modulation pattern presented to the spatial light modulator,
wherein the controller causes the spatial light modulator to present the modulation pattern including a converging position change pattern for changing a position of the first converging point in the direction intersecting the entrance surface according to a distance between the first converging point and the second converging point and a processing depth of the laser processing from the entrance surface so as to change the distance between the first converging point and the second converging point in the direction intersecting the entrance surface,
wherein in a first control, the controller adjusts a position of the second converging point in the direction intersecting the entrance surface so that the measurement light does not interfere with a device portion formed on the entrance surface while the distance between the first converging point and the second converging point is maintained by not presenting the converging position changing pattern,
wherein after the first control, in a second control the controller adjusts a position of the first converging point in the direction intersecting the entrance surface so that the first converging point is positioned on a processing position while the position of the second converging point is maintained by presenting the converging position changing pattern, and
wherein after processing using the positions adjusted in the first control and the second control on one line to process, when processing is performed on the same line to process and at a different depth, the controller turns off the measurement light and performs said processing by reproducing displacement information of the entrance surface.