US 11,963,285 B2
Target material control in an EUV light source
Abhiram Lakshmi Ganesh Govindaraju, San Diego, CA (US); David Bessems, San Diego, CA (US); Sandeep Rai, Corona, CA (US); Petrus Adrianus Willems, Eindhoven (NL); Serkan Kincal, San Diego, CA (US); Joshua Mark Lukens, San Diego, CA (US); and Jon David Tedrow, San Diego, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/435,861
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Mar. 9, 2020, PCT No. PCT/EP2020/056144
§ 371(c)(1), (2) Date Sep. 2, 2021,
PCT Pub. No. WO2020/187617, PCT Pub. Date Sep. 24, 2020.
Claims priority of provisional application 62/951,577, filed on Dec. 20, 2019.
Claims priority of provisional application 62/842,453, filed on May 2, 2019.
Claims priority of provisional application 62/819,366, filed on Mar. 15, 2019.
Prior Publication US 2022/0159817 A1, May 19, 2022
Int. Cl. H05G 2/00 (2006.01); G03F 7/00 (2006.01)
CPC H05G 2/006 (2013.01) [G03F 7/70033 (2013.01); H05G 2/008 (2013.01)] 40 Claims
OG exemplary drawing
 
1. An apparatus for supplying a target material, the apparatus comprising:
a first reservoir system comprising a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, the first fluid reservoir maintained at a first pressure;
a second reservoir system comprising a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system;
a priming system configured to receive a solid matter that includes a target material and to produce a fluid target material from the solid matter, the priming system maintained at a priming pressure that is less than the first pressure; and
a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system, wherein the fluid control system is configured to:
isolate at least one fluid reservoir and the nozzle supply system from the priming system during operation of the nozzle supply system, and
maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system during operation of the nozzle supply system.