US 11,961,704 B2
Charged particle beam system
Naoki Akimoto, Tokyo (JP); Takashi Doi, Tokyo (JP); and Yuzuru Mochizuki, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/595,742
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Jul. 2, 2019, PCT No. PCT/JP2019/026230
§ 371(c)(1), (2) Date Nov. 23, 2021,
PCT Pub. No. WO2021/001916, PCT Pub. Date Jan. 7, 2021.
Prior Publication US 2022/0223372 A1, Jul. 14, 2022
Int. Cl. H01J 37/28 (2006.01); H01J 37/09 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/09 (2013.01); H01J 37/265 (2013.01); H01J 2237/057 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A charged particle beam system having a computer system for controlling an acceleration voltage of a charged particle beam emitted from a charged particle source, the system comprising:
a first diaphragm group having first and second diaphragms which are diaphragms that act on the charged particle beam and have different thicknesses; and
a first diaphragm switching mechanism for switching the diaphragm in the first diaphragm group, wherein
the computer system controls the first diaphragm switching mechanism so as to switch from the first diaphragm to the second diaphragm according to an increase or decrease of the acceleration voltage.