CPC H01J 37/261 (2013.01) [H01J 2237/2003 (2013.01); H01J 2237/2802 (2013.01)] | 23 Claims |
1. A method of preparing a nanofluidic LCTEM cell, comprising:
coating a photoresist layer onto a top surface of a silicon nitride substrate;
etching channels into the photoresist layer;
depositing calcite into the etched channels;
removing the photoresist;
placing the cell on a holder;
connecting a first end of an inlet line to the cell;
connecting a second end of the inlet line to an ultrasound transducer configured to generate nanobubbles; and
connecting an outlet line to the cell.
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