US 11,961,702 B2
Fabrication of in situ HR-LCTEM nanofluidic cell for nanobubble interactions during EOR processes in carbonate rocks
Hassan Alqahtani, Dhahran (SA); Dong Kyu Cha, Dhahran (SA); and Mohammed Al Otaibi, Dhahran (SA)
Assigned to Saudi Arabian Oil Company, Dhahran (SA)
Filed by Saudi Arabian Oil Company, Dhahran (SA)
Filed on Dec. 9, 2021, as Appl. No. 17/546,604.
Prior Publication US 2023/0187170 A1, Jun. 15, 2023
Int. Cl. H01J 37/26 (2006.01)
CPC H01J 37/261 (2013.01) [H01J 2237/2003 (2013.01); H01J 2237/2802 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A method of preparing a nanofluidic LCTEM cell, comprising:
coating a photoresist layer onto a top surface of a silicon nitride substrate;
etching channels into the photoresist layer;
depositing calcite into the etched channels;
removing the photoresist;
placing the cell on a holder;
connecting a first end of an inlet line to the cell;
connecting a second end of the inlet line to an ultrasound transducer configured to generate nanobubbles; and
connecting an outlet line to the cell.