CPC H01J 37/222 (2013.01) [G06T 7/001 (2013.01); H01J 37/28 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20048 (2013.01); G06T 2207/30141 (2013.01); H01J 2237/223 (2013.01); H01J 2237/2817 (2013.01)] | 15 Claims |
1. A method related to image enhancement for a multi-beam charged-particle system, the method comprising:
performing a frequency analysis of signal information representative of first and second images, wherein the first image is associated with a first beam of a set of beams and the second image is associated with a second beam of the set of beams;
detecting, based on the frequency analysis, disturbances in positioning of the first and second beams in relation to a sample;
obtaining an image of the sample using the signal information of the first and second beams; and
correcting the image of the sample based on the detected disturbances.
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