US 11,961,700 B2
Systems and methods for image enhancement for a multi-beam charged-particle inspection system
Maikel Robert Goosen, Eindhoven (NL); Albertus Victor Gerardus Mangnus, Eindhoven (NL); and Lucas Kuindersma, Eindhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/601,697
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Mar. 25, 2020, PCT No. PCT/EP2020/058354
§ 371(c)(1), (2) Date Oct. 5, 2021,
PCT Pub. No. WO2020/200958, PCT Pub. Date Oct. 8, 2020.
Claims priority of application No. 19167583 (EP), filed on Apr. 5, 2019.
Prior Publication US 2022/0199358 A1, Jun. 23, 2022
Int. Cl. H01J 37/22 (2006.01); G06T 7/00 (2017.01); H01J 37/28 (2006.01)
CPC H01J 37/222 (2013.01) [G06T 7/001 (2013.01); H01J 37/28 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20048 (2013.01); G06T 2207/30141 (2013.01); H01J 2237/223 (2013.01); H01J 2237/2817 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method related to image enhancement for a multi-beam charged-particle system, the method comprising:
performing a frequency analysis of signal information representative of first and second images, wherein the first image is associated with a first beam of a set of beams and the second image is associated with a second beam of the set of beams;
detecting, based on the frequency analysis, disturbances in positioning of the first and second beams in relation to a sample;
obtaining an image of the sample using the signal information of the first and second beams; and
correcting the image of the sample based on the detected disturbances.