US 11,961,698 B2
Replaceable module for a charged particle apparatus
Christiaan Otten, IJsselstein (NL); Peter-Paul Crans, Poeldijk (NL); Marc Smits, Pijnacker (NL); Laura Del Tin, The Hague (NL); Christan Teunissen, Delft (NL); Yang-Shan Huang, Veldhoven (NL); Stijn Wilem Herman Karel Steenbrink, The Hague (NL); Xuerang Hu, San Jose, CA (US); Qingpo Xi, Fremont, CA (US); Xinan Luo, San Jose, CA (US); and Xuedong Liu, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Jun. 10, 2021, as Appl. No. 17/344,446.
Claims priority of provisional application 63/037,481, filed on Jun. 10, 2020.
Claims priority of application No. 20197510 (EP), filed on Sep. 22, 2020.
Prior Publication US 2021/0391139 A1, Dec. 16, 2021
Int. Cl. H01J 37/15 (2006.01); H01J 37/02 (2006.01); H01J 37/14 (2006.01); H01J 37/147 (2006.01); H01J 37/18 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01); H01J 37/20 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/15 (2013.01) [H01J 37/023 (2013.01); H01J 37/14 (2013.01); H01J 37/1477 (2013.01); H01J 37/18 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 37/20 (2013.01); H01J 37/3177 (2013.01); H01J 2237/2006 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/2817 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A module for supporting a device configured to manipulate paths of charged particles in a charged particle apparatus, the module comprising:
a module flange configured to attach to, and detach from, a housing flange of a housing of the charged particle apparatus such that the module is field replaceable in the charged particle apparatus;
wherein, when the module is in use in the charged particle apparatus with the module supporting a charged particle optical device, the charged particle optical device is configured to manipulate a charged particle path that is substantially along a charged particle axis of the charged particle apparatus; and
wherein the charged particle axis corresponds to a z-axis; and the module is a substantially planar structure in an x-y plane;
wherein the module comprises:
a device support for supporting the charged particle optical device; and
a mechanism for adjusting the position of the device support in at least one degree of freedom of movement,
wherein the mechanism for adjusting a position of the device support comprises one or more adjustable supports, and is configured to be operated when the module is outside of the charged particle apparatus, wherein one or more of the adjustable supports are configured to be inside the charged particle apparatus when the module is inside the charged particle apparatus.