CPC H01J 37/09 (2013.01) [H01J 37/12 (2013.01); H01J 37/1472 (2013.01); H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/1205 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/2817 (2013.01)] | 20 Claims |
1. A source-conversion unit comprising:
an image-forming element array having a plurality of image-forming elements configured to form a plurality of images of a charged-particle source by influencing a plurality of beamlets of a primary charged particle beam generated by the charged-particle source; and
an aberration compensator array having a plurality of micro-compensators configured to compensate aberrations of the plurality of images, wherein each micro-compensator comprises a micro-lens element placed in one layer of a first set of layers and a micro-stigmator element placed in another layer of the first set of layers,
wherein a layer of the first set of layers includes at least one micro-lens element and at least one micro-stigmator element.
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