US 11,961,627 B2
Vacuum chamber arrangement for charged particle beam generator
Alexander Hendrik Vincent Van Veen, Rotterdam (NL); Willem Henk Urbanus, Delft (NL); and Marco Jan-Jaco Wieland, Delft (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on May 31, 2023, as Appl. No. 18/326,935.
Application 18/326,935 is a continuation of application No. 17/403,849, filed on Aug. 16, 2021, granted, now 11,705,252.
Application 17/403,849 is a continuation of application No. 16/796,849, filed on Feb. 20, 2020, granted, now 11,094,426, issued on Aug. 17, 2021.
Application 16/796,849 is a continuation of application No. 15/493,159, filed on Apr. 21, 2017, granted, now 10,586,625, issued on Aug. 17, 2021.
Application 15/493,159 is a continuation in part of application No. 14/541,233, filed on Nov. 14, 2014, granted, now 9,905,322, issued on Feb. 27, 2018.
Application 14/541,233 is a continuation in part of application No. 14/400,569, granted, now 9,653,261, issued on May 16, 2017, previously published as PCT/EP2013/059963, filed on May 14, 2013.
Claims priority of provisional application 61/904,057, filed on NaN, NaN.
Claims priority of provisional application 61/646,839, filed on May 14, 2012.
Prior Publication US 2023/0386696 A1, Nov. 30, 2023
Int. Cl. H01J 37/30 (2006.01); G21K 1/02 (2006.01); G21K 5/04 (2006.01); H01J 37/12 (2006.01); H01J 37/16 (2006.01); H01J 37/317 (2006.01)
CPC G21K 5/04 (2013.01) [G21K 1/02 (2013.01); H01J 37/12 (2013.01); H01J 37/16 (2013.01); H01J 37/3007 (2013.01); H01J 37/3177 (2013.01); H01J 2237/002 (2013.01); H01J 2237/0213 (2013.01); H01J 2237/0216 (2013.01); H01J 2237/024 (2013.01); H01J 2237/0262 (2013.01); H01J 2237/032 (2013.01); H01J 2237/1207 (2013.01); H01J 2237/1215 (2013.01); H01J 2237/16 (2013.01); H01J 2237/1825 (2013.01); H01J 2237/30472 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A collimator electrode stack, comprising:
a plurality of stacked collimator electrodes for collimating a charged particle beam along an optical axis, wherein each collimator electrode of the plurality of stacked collimator electrodes comprises an electrode body with an electrode aperture for permitting passage of the charged particle beam, wherein the electrode bodies are mutually spaced along an axial direction that is substantially parallel with the optical axis, and wherein the electrode apertures are coaxially aligned along the optical axis; and
a stack support system for supporting the collimator electrode stack with respect to an external reference frame, and connected to a lateral region of the collimator electrode stack.