CPC G06Q 10/0639 (2013.01) [G06N 3/084 (2013.01); G06Q 50/04 (2013.01)] | 20 Claims |
1. A method, comprising:
receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber;
processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data;
generating a quality index score based on the summary data, wherein the quality index score is generated in view of:
a plurality of weighting factors, wherein a weighting factor determines a significance of a contribution of data generated by a first sensor during a first process operation to the quality index score; and
a plurality of control limits, wherein a control limit is a threshold used to classify a data point of the summary data; and
performing a corrective action in view of the quality index score.
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