US 11,961,030 B2
Diagnostic tool to tool matching methods for manufacturing equipment
Sejune Cheon, Seoul (KR); Jeong Jin Hong, Yongin (KR); Mikyung Shim, Seongnam (KR); Xiaoqun Zou, Danville, CA (US); Jinkyeong Lee, Seoul (KR); and Sang Hong Kim, Seoul (KR)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 27, 2022, as Appl. No. 17/586,700.
Prior Publication US 2023/0237412 A1, Jul. 27, 2023
Int. Cl. G06Q 10/0639 (2023.01); G06N 3/084 (2023.01); G06Q 50/04 (2012.01)
CPC G06Q 10/0639 (2013.01) [G06N 3/084 (2013.01); G06Q 50/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber;
processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data;
generating a quality index score based on the summary data, wherein the quality index score is generated in view of:
a plurality of weighting factors, wherein a weighting factor determines a significance of a contribution of data generated by a first sensor during a first process operation to the quality index score; and
a plurality of control limits, wherein a control limit is a threshold used to classify a data point of the summary data; and
performing a corrective action in view of the quality index score.