CPC G03F 9/7011 (2013.01) [G03F 9/7046 (2013.01); G03F 9/7049 (2013.01); G03F 9/7088 (2013.01); G03F 9/7096 (2013.01)] | 16 Claims |
1. A pre-alignment system with at least two channels, comprising:
a common object lens group configured to collect diffracted beams from a patterning device, wherein the common object lens group is further configured to produce telecentricity in an object space of the pre-alignment system;
a multipath sensory array comprising at least one image lens system, wherein the at least one image lens system comprises:
a telecentric converter lens configured to produce telecentricity in an image space of the pre-alignment system; and
a detector for each of the at least one image lens system, wherein the detector is configured to create a pre-alignment signal based on the diffracted beams.
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