US 11,960,216 B2
Invariable magnification multilevel optical device with telecentric converter
Lev Ryzhikov, Norwalk, CT (US); and Yuli Vladimirsky, Weston, CT (US)
Assigned to ASML Holding N.V., Veldhoven (NL)
Appl. No. 17/641,212
Filed by ASML Holding N.V., Veldhoven (NL)
PCT Filed Aug. 25, 2020, PCT No. PCT/EP2020/073778
§ 371(c)(1), (2) Date Mar. 8, 2022,
PCT Pub. No. WO2021/047903, PCT Pub. Date Mar. 18, 2021.
Claims priority of provisional application 62/897,675, filed on Sep. 9, 2019.
Prior Publication US 2024/0053688 A1, Feb. 15, 2024
Int. Cl. G03F 9/00 (2006.01)
CPC G03F 9/7011 (2013.01) [G03F 9/7046 (2013.01); G03F 9/7049 (2013.01); G03F 9/7088 (2013.01); G03F 9/7096 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A pre-alignment system with at least two channels, comprising:
a common object lens group configured to collect diffracted beams from a patterning device, wherein the common object lens group is further configured to produce telecentricity in an object space of the pre-alignment system;
a multipath sensory array comprising at least one image lens system, wherein the at least one image lens system comprises:
a telecentric converter lens configured to produce telecentricity in an image space of the pre-alignment system; and
a detector for each of the at least one image lens system, wherein the detector is configured to create a pre-alignment signal based on the diffracted beams.