US 11,960,215 B2
Radiation filter for a radiation sensor
Vahid Mohammadi, Eindhoven (NL); Yassin Chowdhury, Geldrop (NL); Pieter Cristiaan De Groot, Heeze (NL); Wouter Joep Engelen, Eindhoven (NL); and Marcel Johannes Petrus Theodorus Van Der Hoorn, Antwerp (BE)
Assigned to ASML NETHERLANDS B. V., Veldhoven (NL)
Appl. No. 17/282,871
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Sep. 19, 2019, PCT No. PCT/EP2019/075125
§ 371(c)(1), (2) Date Apr. 5, 2021,
PCT Pub. No. WO2020/083578, PCT Pub. Date Apr. 30, 2020.
Claims priority of application No. 18201678 (EP), filed on Oct. 22, 2018.
Prior Publication US 2021/0349398 A1, Nov. 11, 2021
Int. Cl. H01L 31/18 (2006.01); G03F 7/00 (2006.01); H01L 31/02 (2006.01); H01L 31/0216 (2014.01)
CPC G03F 7/7085 (2013.01) [H01L 31/02019 (2013.01); H01L 31/02161 (2013.01); H01L 31/02164 (2013.01); H01L 31/1868 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A radiation sensor comprising:
a radiation filter for reducing transmission of an unwanted wavelength of radiation, the radiation filter comprising zirconium and SiN3;
a passivation layer arranged to receive radiation transmitted by the radiation filter;
a photodiode arranged to receive radiation transmitted by the passivation layer; and
circuit elements connected to the photodiode.