CPC G03F 7/7085 (2013.01) [H01L 31/02019 (2013.01); H01L 31/02161 (2013.01); H01L 31/02164 (2013.01); H01L 31/1868 (2013.01)] | 20 Claims |
1. A radiation sensor comprising:
a radiation filter for reducing transmission of an unwanted wavelength of radiation, the radiation filter comprising zirconium and SiN3;
a passivation layer arranged to receive radiation transmitted by the radiation filter;
a photodiode arranged to receive radiation transmitted by the passivation layer; and
circuit elements connected to the photodiode.
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