CPC G03F 7/70341 (2013.01) [B05D 3/06 (2013.01); B05D 5/00 (2013.01); B22F 7/062 (2013.01); B22F 10/00 (2021.01); B22F 10/20 (2021.01); B23K 26/342 (2015.10); B23K 26/354 (2015.10); B23Q 3/18 (2013.01); B33Y 10/00 (2014.12); B33Y 80/00 (2014.12); G03F 7/20 (2013.01); G03F 7/70416 (2013.01); G03F 7/707 (2013.01); G03F 7/70708 (2013.01); G03F 7/70716 (2013.01); G03F 7/70733 (2013.01); G03F 7/708 (2013.01); B22F 10/25 (2021.01); B22F 10/28 (2021.01); B22F 10/66 (2021.01)] | 20 Claims |
1. A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
a main body having a first side of the main body and a second side of the main body opposite to the first side;
a plurality of first burls at the first side of the main body and having end surfaces to support a substrate in the lithographic apparatus, wherein each of the first burls comprises a lower body portion protruding from the main body and an upper body portion above the lower body portion, wherein the lower body portions are a different material than the upper body portions, and wherein the upper body portions comprise a material selected from: diamond, diamond-like carbon, SiC, SiO2, TiN, cubic boron nitride, silicon nitride, titanium, titanium carbide, cordierite or aluminum nitride; and
a plurality of second burls at the second side of the main body,
wherein the main body is grounded.
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