US 11,959,868 B2
Capacitive sensor for monitoring gas concentration
Xiaopu Li, San Jose, CA (US); Kallol Bera, San Jose, CA (US); Yaoling Pan, San Jose, CA (US); Kelvin Chan, San Ramon, CA (US); Amir Bayati, Santa Clara, CA (US); Philip Allan Kraus, San Jose, CA (US); Kenric T. Choi, Santa Clara, CA (US); and William John Durand, San Francisco, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 3, 2021, as Appl. No. 17/166,967.
Prior Publication US 2022/0244205 A1, Aug. 4, 2022
Int. Cl. C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); G01N 27/22 (2006.01); G01N 33/00 (2006.01); H01L 21/67 (2006.01)
CPC G01N 27/22 (2013.01) [C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); C23C 16/52 (2013.01); G01N 33/0027 (2013.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A gas concentration sensor, comprising:
a first electrode above a substrate, wherein the first electrode comprises first fingers; and
a second electrode above the substrate, wherein the second electrode comprises second fingers that are interdigitated with the first fingers, the first electrode comprising a first plate along a vertical direction relative to the substrate, the second electrode comprising a second plate along the vertical direction, and the first fingers and second fingers laterally between the first electrode and the second electrode along a horizontal direction relative to the substrate, and wherein the second electrode is capacitively coupled to the first electrode to provide a capacitance to measure a gas concentration.