CPC G01N 27/22 (2013.01) [C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); C23C 16/52 (2013.01); G01N 33/0027 (2013.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01)] | 9 Claims |
1. A gas concentration sensor, comprising:
a first electrode above a substrate, wherein the first electrode comprises first fingers; and
a second electrode above the substrate, wherein the second electrode comprises second fingers that are interdigitated with the first fingers, the first electrode comprising a first plate along a vertical direction relative to the substrate, the second electrode comprising a second plate along the vertical direction, and the first fingers and second fingers laterally between the first electrode and the second electrode along a horizontal direction relative to the substrate, and wherein the second electrode is capacitively coupled to the first electrode to provide a capacitance to measure a gas concentration.
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