CPC G01J 5/024 (2013.01) [B81B 3/0029 (2013.01); G01J 5/20 (2013.01); H04N 23/11 (2023.01); B81B 2201/047 (2013.01)] | 20 Claims |
1. A microelectromechanical system, comprising:
a substrate comprising a surface;
a lid comprising a surface;
spacers separating the lid and the substrate, wherein each of the spacers is coupled to the surface of the substrate and the surface of the lid;
a cavity defined by the spacers, the surface of the lid, and the surface of the substrate;
a pixel in the cavity to detect radiation, the pixel positioned on the surface of the substrate; and
a reflector comprising an antenna structure and a transmission line to:
direct the radiation to the pixel; and
shift a phase of the radiation.
|