US 11,959,793 B2
Flow metrology calibration for improved processing chamber matching in substrate processing systems
Evangelos T. Spyropoulos, San Jose, CA (US); and Piyush Agarwal, Newark, CA (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Appl. No. 17/641,240
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Sep. 10, 2020, PCT No. PCT/US2020/050099
§ 371(c)(1), (2) Date Mar. 8, 2022,
PCT Pub. No. WO2021/050663, PCT Pub. Date Mar. 18, 2021.
Claims priority of provisional application 62/898,825, filed on Sep. 11, 2019.
Prior Publication US 2022/0333972 A1, Oct. 20, 2022
Int. Cl. G01F 25/10 (2022.01); G01F 15/04 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC G01F 25/15 (2022.01) [G01F 15/043 (2013.01); H01J 37/32449 (2013.01); H01J 37/32091 (2013.01); H01J 2237/24585 (2013.01); H01L 21/67253 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A calibration system for an orifice-based flow metrology system, comprising:
a gas box including valves and mass flow controllers to selectively supply a first calibration gas, a second calibration gas and a third calibration gas:
a first metrology system including a first temperature sensor, a first pressure sensor and a first orifice having a first orifice size;
a reference metrology system including a second temperature sensor, a second pressure sensor and a second orifice having the first orifice size;
a controlled heating source configured to heat the first temperature sensor and the second temperature sensor;
a controller configured to:
a) cause the controlled heating source to heat the first temperature sensor and the second temperature sensor to a plurality of temperatures in a predetermined operating temperature range;
b) cause a first transfer function to be generated based on first and second temperatures sensed by the first and second temperature sensors, respectively;
c) cause the first calibration gas to be supplied at a plurality of pressures in a predetermined pressure range and a second transfer function to be generated based on first and second pressures sensed by the first and second pressure sensors, respectively;
d) cause a first plurality of flow rate measurements to be performed in a predetermined flow rate range with the first metrology system and the reference metrology system, wherein the first metrology system and the reference metrology system use the first calibration gas; and
e) cause temperature and pressure to be calibrated using the first transfer function and the second transfer function, respectively, and a corresponding transfer function to be determined for the first calibration gas based on the first plurality of flow rate measurements.