US 11,959,190 B2
Device for connecting a susceptor to a drive shaft
Torsten Werner Bastke, Würselen (DE); Francisco Ruda Y Witt, Eschweiler (DE); and Mike Pfisterer, Würselen (DE)
Assigned to AIXTRON SE, Herzogenrath (DE)
Appl. No. 16/964,152
Filed by AIXTRON SE, Herzogenrath (DE)
PCT Filed Jan. 22, 2019, PCT No. PCT/EP2019/051433
§ 371(c)(1), (2) Date Jul. 22, 2020,
PCT Pub. No. WO2019/145271, PCT Pub. Date Aug. 1, 2019.
Claims priority of application No. 20 2018 100 363.1 (DE), filed on Jan. 23, 2018.
Prior Publication US 2021/0032771 A1, Feb. 4, 2021
Int. Cl. H05B 6/80 (2006.01); C23C 16/458 (2006.01); C30B 25/12 (2006.01); H05B 3/68 (2006.01)
CPC C30B 25/12 (2013.01) [C23C 16/4584 (2013.01); C23C 16/4586 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A device for attaching a susceptor (31) of a chemical vapor deposition (CVD) reactor to a drive shaft (40), the device comprising:
a support plate (2) with a bearing surface (5), on which a supporting face (32) of the susceptor (31) rests;
a flange element (4);
a base plate (3) that is connected by the flange element (4) to the drive shaft (40); and
adjustment means (16, 17, 18, 19) for adjusting an inclination of the bearing surface (5) of the support plate (2) relative to a seating face (3″) of the base plate (3),
wherein the adjustment means (16, 17, 18, 19) comprise adjustment levers (16) each having a first lever arm (17) and a second lever arm (18) and being located between the base plate (3) and the support plate (2).