US 11,958,162 B2
CMP pad construction with composite material properties using additive manufacturing processes
Rajeev Bajaj, Fremont, CA (US); Kasiraman Krishnan, Milpitas, CA (US); Mahendra C. Orilall, Downingtown, PA (US); Daniel Redfield, Morgan Hill, CA (US); Fred C. Redeker, Fremont, CA (US); Nag B. Patibandla, Pleasanton, CA (US); Gregory E. Menk, Pleasanton, CA (US); Jason G. Fung, Santa Clara, CA (US); Russell Edward Perry, Pleasanton, CA (US); and Robert E. Davenport, Los Gatos, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 17, 2020, as Appl. No. 16/746,065.
Application 15/876,436 is a division of application No. 14/695,299, filed on Apr. 24, 2015, granted, now 9,873,180, issued on Jan. 23, 2018.
Application 16/746,065 is a continuation of application No. 15/876,436, filed on Jan. 22, 2018, granted, now 10,537,974, issued on Jan. 21, 2020.
Claims priority of provisional application 62/065,193, filed on Oct. 17, 2014.
Claims priority of provisional application 62/065,270, filed on Oct. 17, 2014.
Prior Publication US 2020/0147750 A1, May 14, 2020
Int. Cl. B24B 37/26 (2012.01); B24B 37/20 (2012.01); B24B 37/22 (2012.01); B24B 37/24 (2012.01); B24D 18/00 (2006.01); B29C 64/112 (2017.01); B33Y 80/00 (2015.01)
CPC B24B 37/26 (2013.01) [B24B 37/205 (2013.01); B24B 37/22 (2013.01); B24B 37/24 (2013.01); B24D 18/0018 (2013.01); B24D 18/0045 (2013.01); B29C 64/112 (2017.08); B33Y 80/00 (2014.12)] 20 Claims
OG exemplary drawing
 
1. A composite polishing pad, comprising:
a base material layer; and
a plurality of features extending from the base material layer to form a polishing surface, wherein
the plurality of features and a surface of the base material layer define one or more channels disposed between the features,
a plurality of pores are arranged in a pattern in the plurality of features, and
the plurality of features are formed from a mixture of at least two different droplet compositions each dispensed by an additive manufacturing system according to a predetermined pattern.