CPC B24B 37/26 (2013.01) [B24B 37/205 (2013.01); B24B 37/22 (2013.01); B24B 37/24 (2013.01); B24D 18/0018 (2013.01); B24D 18/0045 (2013.01); B29C 64/112 (2017.08); B33Y 80/00 (2014.12)] | 20 Claims |
1. A composite polishing pad, comprising:
a base material layer; and
a plurality of features extending from the base material layer to form a polishing surface, wherein
the plurality of features and a surface of the base material layer define one or more channels disposed between the features,
a plurality of pores are arranged in a pattern in the plurality of features, and
the plurality of features are formed from a mixture of at least two different droplet compositions each dispensed by an additive manufacturing system according to a predetermined pattern.
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