US 12,279,512 B2
Extendible deposition mask and display apparatus provided using the same
Dongseob Jeong, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Mar. 29, 2021, as Appl. No. 17/215,055.
Application 17/215,055 is a continuation of application No. 15/671,250, filed on Aug. 8, 2017, granted, now 10,964,889, issued on Mar. 30, 2021.
Claims priority of application No. 10-2016-0121518 (KR), filed on Sep. 22, 2016.
Prior Publication US 2021/0217957 A1, Jul. 15, 2021
Int. Cl. C23C 14/04 (2006.01); B05C 21/00 (2006.01); C23C 16/04 (2006.01); H01L 21/3213 (2006.01); H01L 21/67 (2006.01); H10K 71/00 (2023.01); H10K 71/16 (2023.01); H10K 71/20 (2023.01)
CPC H10K 71/166 (2023.02) [B05C 21/005 (2013.01); C23C 14/042 (2013.01); C23C 16/042 (2013.01); H01L 21/32139 (2013.01); H01L 21/67 (2013.01); H10K 71/00 (2023.02); H10K 71/20 (2023.02)] 5 Claims
OG exemplary drawing
 
1. A display apparatus comprising:
a target substrate comprising a layer of a deposition material provided through a deposition mask,
wherein
the deposition mask is extendible in a length direction of the deposition mask, the deposition mask comprising:
a clamping portion which is at opposite ends of the deposition mask along the length direction, the clamping portion being configured to receive a force in a tensile direction along the length direction,
a pattern portion comprising a plurality of deposition pattern holes through which the deposition material passes to the target substrate,
the pattern portion provided in plural comprising:
first pattern portions arranged along the length direction and aligned with the clamping portion along the length direction, and
second pattern portions arranged along the length direction and adjacent to the first pattern portions in a width direction of the deposition mask which crosses the length direction,
a first area extended along the length direction between the opposite ends, the first area defining the clamping portion and including each of the first pattern portions, and
a second area extended along the length direction between the opposite ends, the second area including each of the second pattern portions,
when the force is not applied to the clamping portion, the deposition mask is not extended in the length direction thereof and includes:
non-extended positions of the first and second pattern portions which are respectively defined by positions of the first and second pattern portions when the force is not applied to the clamping portion, and
for the non-extended positions of the first and second pattern portions, a first distance along the length direction between adjacent first pattern portions which is less than a second distance along the length direction between adjacent second pattern portions,
a plurality of first distances is respectively defined between the adjacent first pattern portions and a plurality of second distances is respectively defined between the adjacent second pattern portions, and for the non-extended positions of the first pattern portions and the second pattern portions, the first distances and the second distances are respectively constant, and
when the force is applied to the opposite ends of the clamping portion in the tensile direction along the length direction, the deposition mask which is extended in the length direction thereof further includes the first distance between the adjacent first pattern portions being equal to the second distance between adjacent second pattern portions.