US 12,279,464 B2
Optical detection device
Takeshi Shimohara, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on Feb. 1, 2021, as Appl. No. 17/163,995.
Application 17/163,995 is a continuation in part of application No. PCT/JP2020/031322, filed on Aug. 19, 2020.
Claims priority of application No. 2019-152775 (JP), filed on Aug. 23, 2019.
Prior Publication US 2021/0159358 A1, May 27, 2021
Int. Cl. H10F 77/40 (2025.01); H04N 25/62 (2023.01); H10F 39/12 (2025.01); H10F 55/25 (2025.01); H10F 77/50 (2025.01); H10F 77/70 (2025.01)
CPC H10F 77/413 (2025.01) [H04N 25/62 (2023.01); H10F 39/12 (2025.01); H10F 55/25 (2025.01); H10F 77/50 (2025.01); H10F 77/707 (2025.01)] 13 Claims
OG exemplary drawing
 
1. An optical detection device comprising:
an optical semiconductor element having a plurality of light receiving portions; and
a light transmitting substrate composed of a single member bonded to the optical semiconductor element directly or via only a light transmitting adhesive layer,
wherein a surface of the light transmitting substrate on a side opposite to the optical semiconductor element is provided with a first refractive index changing layer having a projecting and recessed structure in which a refractive index continuously changes from a refractive index of air to a refractive index of the light transmitting substrate toward the light transmitting substrate,
wherein in the projecting and recessed structure, a plurality of projections or a plurality of recesses are arranged at a distance between centers of 100 nm to 200 nm, and a height of each of the plurality of projections or a depth of each of the plurality of recesses is 50 nm to 400 nm,
wherein, a distance between the optical semiconductor element and the first refractive index changing layer is A (A>50 μm), a distance between adjacent light receiving portions of the plurality of light receiving portions is B, a refractive index of the light transmitting substrate to a refractive index of the air is n, and A>B/[2tan{sin−1(sin1°/n)}] is established, and
wherein each of the plurality of light receiving portions includes a configuration of an avalanche photodiode such that self-light-emission can occur due to recoupling of electric charges.