US 12,279,431 B2
Integrated assemblies and methods of forming integrated assemblies
Ramey M. Abdelrahaman, Boise, ID (US); Jeslin J. Wu, Boise, ID (US); Chandra Tiwari, Boise, ID (US); Kunal Shrotri, Boise, ID (US); and Swapnil Lengade, Boise, ID (US)
Filed by Lodestar Licensing Group LLC, Evanston, IL (US)
Filed on May 17, 2023, as Appl. No. 18/198,752.
Application 17/718,863 is a division of application No. 16/902,897, filed on Jun. 16, 2020, granted, now 11,329,064, issued on May 10, 2022.
Application 18/198,752 is a continuation of application No. 17/718,863, filed on Apr. 12, 2022, granted, now 11,706,924.
Prior Publication US 2023/0292510 A1, Sep. 14, 2023
Int. Cl. H10B 43/27 (2023.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 21/3115 (2006.01); H10B 41/27 (2023.01); H10B 41/35 (2023.01); H10B 43/35 (2023.01)
CPC H10B 43/27 (2023.02) [H01L 21/02164 (2013.01); H01L 21/0217 (2013.01); H01L 21/022 (2013.01); H01L 21/31111 (2013.01); H01L 21/3115 (2013.01); H10B 41/27 (2023.02); H10B 41/35 (2023.02); H10B 43/35 (2023.02)] 21 Claims
OG exemplary drawing
 
1. An integrated assembly, comprising:
a vertical stack of first levels alternating with second levels, the first levels comprising a first material and the second levels comprising a second material;
wherein the first material in each of the first levels has a same primary composition;
wherein the vertical stack includes a plurality of vertically-displaced regions, each of the plurality of vertically displaced regions including at least one of the first levels and at least one of the second levels; and
wherein the first material in the first levels of a first of the plurality of vertically-displaced regions is compositionally different relative to the first material in the first levels of a second of the plurality of vertically-displaced regions; and
an opening extending vertically through the stack, wherein the opening has a substantially uniform width along the plurality of vertically-displaced regions, enabled by the compositionally different material in different vertically-displaced regions.