US 12,279,409 B2
Array of capacitors and method used in forming an array of capacitors
Yuichi Yokoyama, Boise, ID (US)
Assigned to Micron Technology, Inc., Boise, ID (US)
Filed by Micron Technology, Inc., Boise, ID (US)
Filed on Mar. 16, 2022, as Appl. No. 17/696,160.
Application 17/696,160 is a division of application No. 16/935,634, filed on Jul. 22, 2020, granted, now 11,309,314.
Prior Publication US 2022/0208771 A1, Jun. 30, 2022
Int. Cl. H10B 12/00 (2023.01); H01L 27/01 (2006.01)
CPC H10B 12/033 (2023.02) [H01L 27/01 (2013.01); H10B 12/315 (2023.02)] 13 Claims
OG exemplary drawing
 
1. An array of capacitors comprising:
a two-dimensional (2D) array of vertically-elongated first capacitor electrodes, each of the vertically-elongated first capacitor electrodes being a solid pillar of conductive material extending vertically relative to a horizontal surface of a base substrate and having an overall vertical height extending from an uppermost surface of the solid pillar to a bottom surface of the solid pillar and having an upper portion over a lower portion, the upper portion extending from the uppermost surface to the lower portion and having a first diameter along an entirety of the upper portion, the lower portion extending to the bottom surface and having a second diameter along an entirety of the lower portion, the second diameter being greater than the first diameter;
a layer of insulative support material against sides of the upper portion and supporting the vertically-elongated first capacitor electrodes in a horizontal cross-section, the layer of the insulative support material comprising a completely-encircling insulative ring that completely encircles around the upper portion of individual of the vertically-elongated first capacitor electrodes in the horizontal cross-section, first immediately-adjacent ones of the completely-encircling insulative rings in a first straight-line direction being laterally directly against one another in the horizontal cross-section, second immediately-adjacent ones of the completely-encircling insulative rings in a second straight-line direction that is angled relative to the first straight-line direction being laterally-spaced from one another in the horizontal cross-section;
a capacitor insulator over the vertically-elongated first capacitor electrodes; and
at least one second capacitor electrode over the capacitor insulator.