US 12,279,357 B1
Electron resonance source apparatus and method of use thereof
W. Davis Lee, Rockport, ME (US); Mark Amato, S. Hamilton, MA (US); Benjamin N. Wright, Haverhill, MA (US); and Gabriel Maxwell, Allston, MA (US)
Filed by W. Davis Lee, Rockport, ME (US); Mark Amato, S. Hamilton, MA (US); Benjamin N. Wright, Haverhill, MA (US); and Gabriel Maxwell, Allston, MA (US)
Filed on Nov. 3, 2023, as Appl. No. 18/386,773.
Int. Cl. H05H 1/46 (2006.01); H05H 1/18 (2006.01)
CPC H05H 1/4637 (2021.05) [H05H 1/18 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for generating a plasma, comprising the steps of:
receiving a microwave from a co-axial cable, with a first impedance, into an electron cyclotron resonance source, said electron cyclotron resonance source comprising: a housing containing a first transform material and a transmission section;
passing the microwave through said first transform material with a second impedance;
coupling the microwave into said transmission section of said electron cyclotron resonance source, said transmission section comprising a third impedance, said transmission section comprising a first dielectric gap positioned between an inner conductor and an outer conductor;
generating a magnetic field with a set of magnets; and
accelerating cyclotron resonant electrons circulating about said magnet field with the microwave.