CPC H05H 1/4637 (2021.05) [H05H 1/18 (2013.01)] | 20 Claims |
1. A method for generating a plasma, comprising the steps of:
receiving a microwave from a co-axial cable, with a first impedance, into an electron cyclotron resonance source, said electron cyclotron resonance source comprising: a housing containing a first transform material and a transmission section;
passing the microwave through said first transform material with a second impedance;
coupling the microwave into said transmission section of said electron cyclotron resonance source, said transmission section comprising a third impedance, said transmission section comprising a first dielectric gap positioned between an inner conductor and an outer conductor;
generating a magnetic field with a set of magnets; and
accelerating cyclotron resonant electrons circulating about said magnet field with the microwave.
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