US 12,278,617 B2
High Q solidly-mounted transversely-excited film bulk acoustic resonators
Bryant Garcia, Mississauga (CA); and Greg Dyer, Santa Barbara, CA (US)
Assigned to Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Dec. 30, 2021, as Appl. No. 17/565,727.
Application 17/565,727 is a continuation in part of application No. 17/555,349, filed on Dec. 17, 2021.
Application 17/555,349 is a continuation in part of application No. 17/229,767, filed on Apr. 13, 2021, granted, now 12,040,779.
Claims priority of provisional application 63/196,645, filed on Jun. 3, 2021.
Claims priority of provisional application 63/074,991, filed on Sep. 4, 2020.
Claims priority of provisional application 63/066,520, filed on Aug. 17, 2020.
Claims priority of provisional application 63/012,849, filed on Apr. 20, 2020.
Prior Publication US 2022/0123726 A1, Apr. 21, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/205 (2006.01); H03H 9/02 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/205 (2013.01) [H03H 9/02015 (2013.01); H03H 9/02157 (2013.01); H03H 9/02228 (2013.01); H03H 9/568 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An acoustic resonator comprising:
a substrate;
a piezoelectric layer;
an acoustic Bragg reflector between a surface of the substrate and a back surface of the piezoelectric layer; and
a conductor pattern on a front surface of the piezoelectric layer, the conductor pattern comprising:
an interdigital transducer (IDT) comprising a first busbar, a second busbar, and interleaved fingers, wherein the interleaved fingers extend alternately from the first and second busbars, and the interleaved fingers comprise a first finger and a last finger at opposing ends of the IDT;
a first reflector element proximate to the first finger; and
a second reflector element proximate to the last finger,
wherein a distance pr between the first reflector element and the first finger and between the second reflector element and the last finger is greater than a pitch p of the IDT, the pitch p being a center-to-center spacing between at least two fingers of the interleaved fingers of the IDT.