US 12,278,616 B2
Electronic device and module including the same
Koichiro Kawasaki, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on May 31, 2023, as Appl. No. 18/204,001.
Application 18/204,001 is a continuation of application No. 17/168,329, filed on Feb. 5, 2021, granted, now 11,791,797.
Application 17/168,329 is a continuation of application No. 16/669,553, filed on Oct. 31, 2019, granted, now 10,931,258, issued on Feb. 23, 2021.
Application 16/669,553 is a continuation of application No. PCT/JP2018/018080, filed on May 10, 2018.
Claims priority of application No. 2017-104823 (JP), filed on May 26, 2017.
Prior Publication US 2023/0308077 A1, Sep. 28, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/10 (2006.01); H01L 23/02 (2006.01); H01L 23/04 (2006.01); H03H 9/02 (2006.01); H03H 9/05 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01)
CPC H03H 9/1092 (2013.01) [H01L 23/02 (2013.01); H01L 23/04 (2013.01); H03H 9/02897 (2013.01); H03H 9/02937 (2013.01); H03H 9/02984 (2013.01); H03H 9/059 (2013.01); H03H 9/1071 (2013.01); H03H 9/25 (2013.01); H03H 9/6483 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An electronic device, comprising:
a piezoelectric substrate including a first main surface;
a functional element provided on or above the first main surface;
an insulation material layer provided on or above the first main surface and surrounding the functional element; and
a protective layer provided on or above the insulation material layer; wherein
the piezoelectric substrate and the insulation material layer define a hollow portion that accommodates the functional element;
in a cross-sectional view in a direction perpendicular to a thickness direction of the piezoelectric substrate, the protective layer includes:
a first portion above the hollow portion;
a second portion adjacent to the first portion at one end of the second portion; and
a third portion adjacent to the second portion at another end of the second portion;
a direction parallel to the first main surface is a first direction in the cross-sectional view in the direction perpendicular to the thickness direction of the piezoelectric substrate; and
a maximum distance in the first direction between one end portion and another end portion of the protective layer is less than a maximum distance in the first direction between one end portion and another end portion of the piezoelectric substrate.