US 12,278,613 B1
Surface acoustic wave resonator device, manufacturing method therefore and filter
Lei Huang, Guangdong (CN); Jie Zou, Guangdong (CN); and Gongbin Tang, Guangdong (CN)
Assigned to Shenzhen Newsonic Technologies Co., Ltd., Shenzhen (CN)
Filed by Shenzhen Newsonic Technologies Co., Ltd., Guangdong (CN)
Filed on Oct. 15, 2024, as Appl. No. 18/916,122.
Claims priority of application No. 202311703567.0 (CN), filed on Dec. 13, 2023.
Int. Cl. H03H 9/02 (2006.01); H03H 3/08 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01)
CPC H03H 9/02818 (2013.01) [H03H 3/08 (2013.01); H03H 9/02637 (2013.01); H03H 9/02834 (2013.01); H03H 9/02944 (2013.01); H03H 9/02992 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A surface acoustic wave resonator device, having a body region and a peripheral region, wherein the peripheral region comprises a first peripheral region and a second peripheral region located at two opposite sides of the body region in a first direction, and the surface acoustic wave resonator device comprises:
a piezoelectric substrate;
an interdigital transducer, disposed on a side of the piezoelectric substrate and comprising a plurality of interdigital electrodes, a first interdigital electrode lead-out part and a second interdigital electrode lead-out part, wherein the plurality of interdigital electrodes comprise a first interdigital electrode and a second interdigital electrode; the first interdigital electrode and the second interdigital electrode extend along the first direction and are alternately arranged along a second direction intersecting with the first direction; wherein the first interdigital electrode is located in the body region and extends across the first peripheral region to be connected to the first interdigital electrode lead-out part, and the second interdigital electrode is located in the body region and extends across the second peripheral region to be connected to the second interdigital electrode lead-out part; and
a clutter suppression structure, disposed on a side of the interdigital transducer away from the piezoelectric substrate and comprising a body structure and a sawtooth structure, wherein the body structure continuously extends along the second direction and overlaps with end portions of the plurality of interdigital electrodes close to the peripheral region in a third direction perpendicular to a main surface of the piezoelectric substrate, and the sawtooth structure is disposed at a side of the body structure away from the body region in the first direction, and at least a portion of the sawtooth structure overlaps with the plurality of interdigital electrodes in the third direction.