US 12,278,611 B2
Multi-gradient raised frame in bulk acoustic wave device
Benfeng Zhang, Moriguchi (JP); Jiansong Liu, Irvine, CA (US); Benjamin Paul Abbott, Irvine, CA (US); Kwang Jae Shin, Yongin (KR); and Alexandre Augusto Shirakawa, Cardiff by the Sea, CA (US)
Assigned to Skyworks Global Pte. Ltd., Singapore (SG)
Filed by Skyworks Global Pte. Ltd., Singapore (SG)
Filed on Sep. 10, 2021, as Appl. No. 17/471,912.
Claims priority of provisional application 63/080,530, filed on Sep. 18, 2020.
Prior Publication US 2022/0094324 A1, Mar. 24, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03F 3/19 (2006.01); H03H 9/00 (2006.01); H03H 9/05 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/54 (2006.01); H03H 9/56 (2006.01); H04B 1/40 (2015.01)
CPC H03H 9/02118 (2013.01) [H03F 3/19 (2013.01); H03H 9/0014 (2013.01); H03H 9/02015 (2013.01); H03H 9/0504 (2013.01); H03H 9/13 (2013.01); H03H 9/132 (2013.01); H03H 9/171 (2013.01); H03H 9/173 (2013.01); H03H 9/54 (2013.01); H03H 9/568 (2013.01); H04B 1/40 (2013.01); H03F 2200/451 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A bulk acoustic wave device with a multi-gradient raised frame, the bulk acoustic wave device comprising:
a first electrode;
a second electrode;
a piezoelectric layer positioned between the first electrode and the second electrode; and
a multi-gradient raised frame structure including a first raised frame layer and a second raised frame layer, the second raised frame layer extending beyond the first raised frame layer, and the second raised frame layer being tapered on opposing sides, and the bulk acoustic wave device being configured to generate a bulk acoustic wave.