| CPC H01M 4/661 (2013.01) [H01M 4/0404 (2013.01); H01M 4/0428 (2013.01); H01M 4/0442 (2013.01); H01M 4/131 (2013.01); H01M 4/134 (2013.01); H01M 4/1391 (2013.01); H01M 4/1395 (2013.01); H01M 4/386 (2013.01); H01M 4/626 (2013.01); H01M 4/667 (2013.01); H01M 4/669 (2013.01); H01M 10/0525 (2013.01); H01M 2004/021 (2013.01); H01M 2004/027 (2013.01)] | 20 Claims |

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1. A method of making an anode for use in an energy storage device, the method comprising:
providing an electrically conductive current collector comprising an electrically conductive layer and a transition metal oxide layer overlaying over the electrically conductive layer; and
depositing a continuous porous lithium storage layer onto the transition metal oxide layer by PECVD, wherein the continuous porous lithium storage layer has a total content of silicon of at least 80 atomic %.
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