US 12,278,315 B2
Method for manufacturing a colour conversion optoelectronic device, including a step of optically forming surface potential patterns in an electret layer
Stephane Altazin, Grenoble (FR); Etienne Quesnel, Grenoble (FR); Aurelien Suhm, Grenoble (FR); and Jeremy Bilde, Grenoble (FR)
Assigned to COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Filed by COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Filed on Aug. 9, 2024, as Appl. No. 18/799,155.
Prior Publication US 2025/0056934 A1, Feb. 13, 2025
Int. Cl. H01L 33/50 (2010.01); H01L 27/15 (2006.01)
CPC H01L 33/502 (2013.01) [H01L 27/156 (2013.01); H01L 33/505 (2013.01); H01L 33/508 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for manufacturing an optoelectronic device including an array of diodes configurated to emit or receive a light radiation, and a color conversion structure, covering at least partially the array of diodes, and containing photoluminescent pads arranged opposite at least one diode, the method comprising:
providing the array of diodes;
making an electret layer covering the array of diodes, and an upper face of which, opposite to the array of diodes, has predefined surface potential patterns where the surface potential is non-zero; and
making the photoluminescent pads, by contact of the electret layer with a colloidal solution containing photoluminescent particles, which are then deposited over the upper face of the electret layer opposite the predefined surface potential patterns, thereby forming the photoluminescent pads,
wherein the step of making the electret layer includes:
(B1) making an electret layer whose upper face has, over its entire face, a non-zero or zero initial surface potential;
(B2a) in the case where the initial surface potential is non-zero:
illuminate areas of the electret layer with a depolarization light radiation which can be absorbed at least partially by the electret layer, said illuminated areas being distinct from non-illuminated areas intended to form the surface potential patterns, the absorption of the depolarization light radiation in the illuminated areas causing a cancellation of the local surface potential, the non-illuminated areas then defining the surface potential patterns; and
(B2b) in the case where the initial surface potential is zero: illuminate areas of the electret layer by a polarization light radiation which can be absorbed at least partially by the electret layer, the absorption of the polarization light radiation in the illuminated areas causing a formation of a non-zero local surface potential, the illuminated areas then defining the surface potential patterns.