| CPC H01L 31/03529 (2013.01) [H01L 31/1804 (2013.01); H01L 31/068 (2013.01)] | 11 Claims |

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1. A solar cell, comprising:
an N-type silicon substrate having a front surface and a rear surface opposite to the front surface; wherein the front surface has a plurality of pyramid structures, and the rear surface has a plurality of grooves, at least one subset of the plurality of grooves being arranged sequentially along one arrangement direction;
a passivation layer, formed over the front surface;
a tunneling dielectric layer, formed on the rear surface; and
a doped conductive layer, formed over the tunneling dielectric layer;
wherein one respective groove of at least some of the plurality of grooves is recessed relative to the rear surface and has a bottom surface, a top opening opposite to the bottom surface, and a side wall located between the bottom surface and the top opening, and an area of an orthographic projection of the bottom surface of the one respective groove on the N-type silicon substrate is less than an area of an orthographic projection of the top opening of the one respective groove on the N-type silicon substrate; and
wherein an orthographic projection of each groove of the at least one subset of the plurality of grooves on the N-type silicon substrate is in a shape of a polygon with M sides, and M is a positive integer greater than or equal to 4.
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