US 12,278,297 B2
Photonic structure with waveguide-to-photodetector coupler oriented along sidewall of a photodetector
Yusheng Bian, Ballston Lake, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Oct. 27, 2022, as Appl. No. 18/050,147.
Prior Publication US 2024/0142725 A1, May 2, 2024
Int. Cl. H01L 31/0232 (2014.01); G02B 6/12 (2006.01); H01L 31/105 (2006.01); G02B 6/42 (2006.01)
CPC H01L 31/02327 (2013.01) [H01L 31/105 (2013.01); G02B 6/12004 (2013.01); G02B 6/4203 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure comprising:
a photodetector including:
a first semiconductor layer; and
a second semiconductor layer on the first semiconductor layer; and
a coupler including stacked cores including: a first core positioned laterally adjacent to the first semiconductor layer; and a second core positioned laterally adjacent to the second semiconductor layer.