a substrate having electrode regions and non-electrode regions that are alternatingly arranged in a first direction, wherein the non-electrode regions include first regions and second regions, wherein each respective second region of the second regions is disposed adjacent to a respective first region of the first regions;

a dielectric layer formed over the electrode regions and the second regions;

a doped conductive layer formed over the dielectric layer;

a passivation layer formed over the first regions and the doped conductive layer; and

a plurality of electrodes, wherein a respective electrode of the plurality of electrodes is formed over a respective electrode region of the plurality of electrode regions, and the plurality of electrodes penetrate the passivation layer to be in electrical contact with the doped conductive layer;

wherein the substrate has a first side and a second side opposite to the first side, wherein the respective first region has at least one groove recessed toward the second side, and the passivation layer is formed in the at least one groove; and

wherein the respective first region includes a third region and a fourth region other than the third region, the at least one groove is located in the third region, and the fourth region has surface roughness equal to or greater than surface roughness of each of the second regions.