| CPC H01L 28/75 (2013.01) [H01G 4/33 (2013.01); H01L 28/55 (2013.01); H01L 28/91 (2013.01); H10B 12/0387 (2023.02); H10B 12/377 (2023.02)] | 36 Claims |
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1. A capacitor comprising:
a first thin-film electrode layer;
a second thin-film electrode layer;
a dielectric layer between the first thin-film electrode layer and the second thin-film electrode layer; and
an interlayer between the dielectric layer and at least one of the first thin-film electrode layer or the second thin-film electrode layer, the interlayer including a crystal with a structure of a same type as and a different composition from a crystal structure of at least one of the first thin-film electrode layer, the second thin-film electrode layer, or the dielectric layer,
wherein the interlayer comprises at least one of a first anionized layer, a second anionized layer, or a first neutral layer,
the first anionized layer including at least one of a monovalent cation, divalent cation, or trivalent cation of an atomic weight of 20 or more,
the second anionized layer including a monovalent cation, and
the first neutral layer including a plurality of trivalent cations, and
wherein a thickness of the interlayer is less than a thickness of the dielectric layer.
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