US 12,278,223 B2
Method for manufacturing display device and display device manufacturing apparatus
Yosuke Tsukamoto, Kanagawa (JP); Taiki Nonaka, Kanagawa (JP); Kensuke Yoshizumi, Kanagawa (JP); Koji Kusunoki, Kanagawa (JP); and Shunpei Yamazaki, Tokyo (JP)
Assigned to Semiconductor Energy Laboratory Co., Ltd., (JP)
Appl. No. 17/278,754
Filed by Semiconductor Energy Laboratory Co., Ltd., Kanagawa-ken (JP)
PCT Filed Sep. 20, 2019, PCT No. PCT/IB2019/057956
§ 371(c)(1), (2) Date Mar. 23, 2021,
PCT Pub. No. WO2020/065472, PCT Pub. Date Apr. 2, 2020.
Claims priority of application No. 2018-185029 (JP), filed on Sep. 28, 2018.
Prior Publication US 2022/0045039 A1, Feb. 10, 2022
Int. Cl. H01L 25/16 (2023.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 23/00 (2006.01); H01L 29/786 (2006.01)
CPC H01L 25/167 (2013.01) [H01L 21/67132 (2013.01); H01L 22/22 (2013.01); H01L 24/80 (2013.01); H01L 24/95 (2013.01); H01L 29/786 (2013.01); H01L 2221/68322 (2013.01); H01L 2221/68386 (2013.01); H01L 2224/80006 (2013.01); H01L 2224/80205 (2013.01); H01L 2224/95001 (2013.01); H01L 2924/12041 (2013.01); Y10S 156/943 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A method for manufacturing a display device, comprising:
forming a first plurality of transistors in a matrix over a substrate;
forming a conductor electrically connected to the first plurality of transistors over the substrate after forming the first plurality of transistors;
forming a first plurality of light-emitting elements each comprising an electrode in a matrix;
attaching the first plurality of light-emitting elements to a first film;
pushing up a region providing the first plurality of light-emitting elements in the first film by using a plate so that the first film is stretched;
attaching a second film to the first plurality of light-emitting elements on one side while pushing up the region in the first film by the plate on the other side;
separating the first film from the plurality of light-emitting elements while fixing the first plurality of light-emitting elements on the second film;
arranging the substrate and the second film so that the conductor and the electrode face each other;
pushing out one of the first plurality of light-emitting elements by an extrusion mechanism through the second film until the conductor and the electrode in one of the first plurality of light-emitting elements are in contact with each other while keeping a distance between the substrate and the first film, after arranging the substrate and the second film; and
electrically connecting the conductor and the electrode in the one of the first plurality of light-emitting elements,
wherein the one of the first plurality of light-emitting elements includes the electrode on one surface and is in contact with the second film on the other surface when the conductor and the electrode are in contact with each other by pushing out the one of the first plurality of light-emitting elements, and
wherein a tensile modulus of elasticity of the second film is greater than or equal to 3 GPa and less than or equal to 18 GPa.