US 12,278,180 B2
Memory arrays and methods used in forming a memory array
Harsh Narendrakumar Jain, Boise, ID (US); and Shuangqiang Luo, Boise, ID (US)
Filed by Lodestar Licensing Group LLC, Evanston, IL (US)
Filed on Oct. 21, 2021, as Appl. No. 17/506,821.
Application 17/506,821 is a division of application No. 16/743,329, filed on Jan. 15, 2020, granted, now 11,183,456.
Prior Publication US 2022/0044995 A1, Feb. 10, 2022
Int. Cl. H01L 21/768 (2006.01); H01L 21/311 (2006.01); H01L 21/762 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H10B 41/10 (2023.01); H10B 41/27 (2023.01); H10B 43/10 (2023.01); H10B 43/27 (2023.01)
CPC H01L 23/528 (2013.01) [H01L 21/31111 (2013.01); H01L 21/76224 (2013.01); H01L 21/76802 (2013.01); H01L 21/76877 (2013.01); H01L 23/5226 (2013.01); H10B 41/10 (2023.02); H10B 41/27 (2023.02); H10B 43/10 (2023.02); H10B 43/27 (2023.02)] 11 Claims
OG exemplary drawing
 
1. A memory array comprising strings of memory cells, comprising:
laterally-spaced memory blocks individually comprising a vertical stack of alternating insulative tiers and conductive tiers, and channel-material strings of memory cells in the vertical stack;
intervening material laterally-between and longitudinally-along the immediately-laterally-adjacent memory blocks, the intervening material extending upwardly from an uppermost of the alternating insulative and conductive tiers to a respective top surface of the intervening material between the memory blocks;
conductive vias in each of the laterally-spaced memory-block regions, wherein the conductive vias are formed in insulating material that is directly above the channel material strings, individual of the conductive vias being directly electrically coupled to individual of the channel-material strings, the conductive vias having respective top surfaces; and
a horizontally-elongated isolation trench formed in a top part of the stack within each of the laterally-spaced memory-block regions, wherein the horizontally-elongated isolation trench is in parallel with the intervening material and positioned above a dummy structure, and wherein laterally-spaced select gates that extend laterally to the intervening material are formed on opposite sides of the isolation trench, and
wherein the top surfaces of the conductive vias, and the respective top surface of the intervening material not being horizontally planar and formed through the insulating material, only a portion of the respective intervening-material-top-surfaces being elevationally-coincident with at least a portion of the respective conductive-via-top surfaces.