US 12,278,164 B1
Chip cooling platform based on micro-nano structure
Haowei Li, Zhanjiang (CN); Weijun Feng, Zhanjiang (CN); Zehao Lu, Zhanjiang (CN); Zeming Chen, Zhanjiang (CN); Runji Xie, Zhanjiang (CN); and Wenguan Li, Zhanjiang (CN)
Assigned to GUANGDONG OCEAN UNIVERSITY, Zhanjiang (CN)
Filed by GUANGDONG OCEAN UNIVERSITY, Zhanjiang (CN)
Filed on Dec. 11, 2024, as Appl. No. 18/976,344.
Application 18/976,344 is a continuation of application No. PCT/CN2024/131445, filed on Nov. 12, 2024.
Claims priority of application No. 202410033073.4 (CN), filed on Jan. 10, 2024.
Int. Cl. H01L 23/473 (2006.01); H01L 23/373 (2006.01); H01L 23/427 (2006.01)
CPC H01L 23/473 (2013.01) [H01L 23/3736 (2013.01); H01L 23/427 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A chip cooling platform based on micro-nano structure, comprising:
a platform body (1);
a cooling pipeline (8), wherein the cooling pipeline (8) is in a closed-loop structure, and part of the cooling pipeline (8) is arranged in the platform body (1); the cooling pipeline (8) is filled with cooling medium, the cooling medium is liquid metal, and an inner wall of the cooling pipeline (8) located in the platform body (1) is provided with a turbulence structure; and a unidirectional hydraulic pump I (14) is installed on the cooling pipeline (8) arranged outside the platform body (1);
and an outer heat dissipation device, wherein the outer heat dissipation device is used for radiating the cooling medium in the cooling pipeline (8);
the turbulence structure comprises a plurality of micro-nano protrusions (9) arranged on the inner wall of the cooling pipeline (8), and the micro-nano protrusions (9) are arranged at equal intervals along a circumferential direction of the cooling pipeline (8), and the micro-nano protrusions (9) are staggered along an axial direction of the cooling pipeline (8);
arrangement angle directions of two adjacent micro-nano protrusions (9) are opposite;
also comprising:
a connecting pipeline, wherein the connecting pipeline is arranged at the outer side of the platform body (1), and both ends of the connecting pipeline are installed on the cooling pipeline (8) through a three-way valve (16); the connecting pipeline is provided with a unidirectional hydraulic pump II (15), and the unidirectional hydraulic pump II (15) is arranged in parallel with the unidirectional hydraulic pump I (14);
a temperature measuring component, wherein the temperature measuring component is arranged on the cooling pipeline (8) at an outlet end of the platform body (1), and the temperature measuring component is used for measuring temperature of the cooling medium in the cooling pipeline (8); and
a control motor (7), wherein the control motor (7) is used for controlling opening and closing and the flow direction of the three-way valve (16), and the temperature measuring component is electrically connected with the control motor (7);
the micro-nano protrusions (9) are foam metal;
the cooling pipeline (8) arranged in the platform body (1) has a serpentine structure;
the outer heat dissipation device comprises a heat dissipation pipeline, both ends of the heat dissipation pipeline are communicated with the cooling pipeline (8); and an evaporator (6), a compressor (2), a condenser (3) and an expansion valve (4) are sequentially arranged on the heat dissipation pipeline along a circulating direction of the cooling medium; and the heat dissipation pipeline at an outlet end of the expansion valve (4) is connected with the cooling pipeline (8) through the evaporator (6).