US 12,278,129 B2
Alignment fixture for a reactor system
Surojit Ganguli, Tempe, AZ (US); Todd Robert Dunn, Cave Creek, AZ (US); and Ankit Kimtee, Phoenix, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Mar. 3, 2021, as Appl. No. 17/190,615.
Claims priority of provisional application 62/985,184, filed on Mar. 4, 2020.
Prior Publication US 2021/0280448 A1, Sep. 9, 2021
Int. Cl. H01L 21/68 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/68 (2013.01) [C23C 16/45544 (2013.01); C23C 16/4583 (2013.01); H01L 21/67259 (2013.01); H01L 21/68735 (2013.01); H01L 21/67069 (2013.01)] 16 Claims
OG exemplary drawing
 
11. An alignment fixture for a reactor system, comprising:
a fixture body comprising an upper surface, a lower surface, and an inner perimeter, the inner perimeter at least partially defining a shape which comprises an inner space of the fixture body, wherein the inner space is configured to receive a susceptor of the reactor system;
a first measuring protrusion coupled to the fixture body at a first position and protruding from the fixture body toward the inner space and across the inner perimeter of the fixture body, wherein the first measuring protrusion comprises an indicator between the inner perimeter of the fixture body and a measuring protrusion end of the first measuring protrusion, wherein the first measuring protrusion is coupled to the upper surface of the fixture body and protrudes toward the inner space, the upper surface disposed on an upper plane of the fixture body, and wherein a top surface of the susceptor is disposed below the upper plane in response to the inner space receiving the susceptor of the reactor system therein;
a second measuring protrusion disposed between 30 degrees and 160 degrees apart from the first measuring protrusion relative to a center of the shape, the second measuring protrusion protruding from the fixture body at a second position toward the inner space, wherein the second measuring protrusion comprises a second indicator between the fixture body and a second measuring protrusion end of the second measuring protrusion; and
a first fixture positioning component that is recessed in the lower surface of the fixture body, the first fixture positioning component configured to receive a plate positioning component therein, wherein the first measuring
protrusion comprises a first plurality of graduation marks disposed between the fixture body and the measuring
protrusion end of the first measuring protrusion, wherein the first plurality of graduation marks comprises the indicator.