	US 12,278,127 B2
	Auto fine-tuner for desired temperature profile
Yi Wang, Santa Clara, CA (US); and Wolfgang Aderhold, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 8, 2022, as Appl. No. 17/835,711.
Prior Publication US 2023/0402305 A1, Dec. 14, 2023
Int. Cl. H01L 21/67 (2006.01)

CPC H01L 21/67248 (2013.01) [H01L 21/67115 (2013.01)]

13 Claims

1. A method of setting a target profile, comprising:

obtaining a first gain curve for one or more temperature sensor offsets;

obtaining a second gain curve for one or more zone multipliers;

combining the first gain curve and the second gain curve into a thermal model;

obtaining a reference data set; and

using the thermal model to generate temperature sensor offsets and/or zone multipliers to apply to the reference data set in order to generate the target profile.

11. A method for setting a target temperature profile in a thermal processing chamber, comprising:

obtaining a first gain curve for one or more temperature sensor offsets of a plurality of temperature sensors;

obtaining a second gain curve for one or more zone multipliers for a plurality of lamp zones, wherein a number of zone multipliers is greater than a number of temperature sensors;

combining the first gain curve and the second gain curve into a thermal model;

obtaining a reference data set; and

using the thermal model to generate temperature sensor offsets and/or zone multipliers to apply to the reference data set in order to generate the target temperature profile.